Products Mechatronics Series
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The Mechatronics series was developed through the integration of precision machining technology and electronics. Precision positioning tables incorporate a linear motion rolling guide and ball screw or motor between the bed and slide table. A wide range of products are available in either the module type or high-precision type. They play an important role in a variety of industries that require equipment with positioning mechanisms such as semiconductor manufacturing equipment, flat panel display manufacturing equipment, and other precision equipment needs. Having the positioning table and electrical control components in one helps reduce design and assembly processes.
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Ball Screw Drive Precision Positioning Table TU
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Ball Screw Drive Precision Positioning Table TE
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Ball Screw Drive Cleanroom Precision Positioning Table TC
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Ball Screw Drive Micro Precision Positioning Table TM
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Ball Screw Drive Precision Positioning Table TS/CT
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Ball Screw Drive Precision Positioning Table L
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Ball Screw Drive Precision Positioning Table LH
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Ball Screw Drive Super Precision Positioning Table TX
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Ball Screw Drive Alignment Table AT
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Ball Screw Drive Alignment Module AM
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Worm gear drive type Rotation Stage SK・・・W
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Ball Screw Drive Precision Elevating Table TZ
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Linear Motor Drive Nano Linear®NT・・・V
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Linear Motor Drive Nano Linear®NT・・・H
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Linear Motor Drive Nano Linear®NT・・・XZ
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Linear Motor Drive Nano Linear®NT・・・XZH
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Linear Motor Drive Linear Motor Table LT
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Linear Motor Drive Alignment Stage SA
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Timing Belt Drive Type Precision Positioning Table LB