Mechatronics Series Alignment Stage SA

Mechatronics Series Alignment Stage SA

Using IKO C-Lube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, low-profile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a high-resolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.